Випуски $\rightarrow$ Том 27, випуск 2 (2026)

Нітрид Алюмінію як перспективний багатофункціональний матеріял. Ч. 1. Властивості, кристалічна структура та технології виготовлення

РУДЕНКО Е.М.$^{1}$, КОРОТАШ І.В.$^{1}$, ДЯКІН М.В.$^{1}$, ПОЛОЦЬКИЙ Д.Ю.$^{1}$, БЕСПАЛОВ С.А.$^{1}$, ГАМАЛІЙ О.В.$^{2}$, ГАМАЛІЙ Н.В.$^{3}$, ДЕХТЯРЕНКО В.А.$^{1,4}$

$^1$Інститут металофізики ім. Г.В. Курдюмова НАН України, бульв. Академіка Вернадського, 36, 03142 Київ, Україна
$^2$Державний науково-дослідний інститут авіації, вул. Казармена, 6, 01135 Київ, Україна
$^3$Центральний науково-дослідний інститут озброєнь і військової техніки Збройних Сил України, просп. Повітряних сил України, 28, 03049 Київ, Україна
$^4$Інститут електрозварювання ім. Є.О. Патона НАН України, вул. Казимира Малевича, 11, 03150 Київ, Україна

Отримано / остаточна версія: 01.03.2025 / 01.06.2026 Завантажити PDF logo PDF

Анотація
Стаття стосується перспективного матеріялу серед нітридів III групи, а саме, нітриду Алюмінію (AlN), який завдяки своїм унікальним властивостям активно застосовується у промисловості. Охарактеризовано його основні фізико-механічні властивості та напрями використання (у акустичних, електронних та оптичних пристроях). На основі термодинамічних розрахунків зазначено, що Ґіббсова вільна енергія для окиснення металевого алюмінію до утворення сполуки Al2O3 є нижчою, і, відповідно до цього, він активніше взаємодіє з киснем, аніж з азотом. Для активації реакції алюмінію з азотом, згідно з Вант-Гоффовим рівнянням, парціяльний тиск азоту має значно переважати тиск кисню і лише в такому випадку алюміній переважно реаґує з азотом, утворюючи хемічну сполуку AlN. Зазначено відомі шляхи зменшення неґативного впливу кисню на процес утворення нітриду Алюмінію. Представлено основні методи одержання нітриду Алюмінію, зокрема тонких плівок, визначено їхні основні переваги та наявні недоліки. Показано, що за основним механізмом хемічної реакції для вихідних компонентів методи одержання поділяють на шість комплексних груп. Визначено, що в залежності від умов формування нітрид Алюмінію може бути в чотирьох модифікаціях: структура типу вюртциту із шириною забороненої зони у 6,2 еВ; структура типу шаруватої гексагональної із шириною забороненої зони у 3,44 еВ; структура типу цинкової обманки (сфалериту) із шириною забороненої зони у 3,24 еВ; структура типу кам’яної солі із шириною забороненої зони у 4,04 еВ. Проаналізовано особливості зазначених модифікацій AlN.

Ключові слова: нітрид Алюмінію, технології виготовлення, кристалічна структура, тонкоплівкові покриття, фізико-механічні властивості.

DOI: https://doi.org/10.15407/ufm.27.02.***

Citation: F. Mollaamin and M. Monajjemi, Nanoencapsulation of Transition Metals by Boron Nitride-Based Hybrid Material: Future Trends of Hydrogen Adsorption towards Energy Storage, Progress in Physics of Metals, 27, No. 2: ***–*** (2026)

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