Aluminium Nitride as a Promising Multifunctional Material. Pt. 1. Properties, Crystal Structure, and Production Techniques
RUDENKO Е.M.$^{1}$, KOROTASH I.V.$^{1}$, DYAKIN M.V.$^{1}$, POLOTSKIY D.Yu.$^{1}$, BESPALOV S.A.$^{1}$, O.V. HAMALII$^{2}$, HAMALII N.V.$^{3}$, and DEKHTYARENKO V.A.$^{1,4}$
$^1$G.V. Kurdyumov Institute for Metal Physics of the N.A.S. of Ukraine, 36 Academician Vernadsky Blvd., UA-03142 Kyiv, Ukraine
$^2$State Scientific-Research Institute of Aviation, 6 Kazarmenna Ave., UA-01135 Kyiv, Ukraine
$^3$Central Scientific Research Institute of Armament and Military Equipment of Armed Forces of Ukraine, 28 Povitrianykh Syl Ave., UA-03049 Kyiv, Ukraine
$^4$E.O. Paton Electric Welding Institute of the N.A.S. of Ukraine, 11 Kazymyr Malevych Str., UA-03150 Kyiv, Ukraine
Received / final version: 01.03.2025 / 01.06.2026
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Abstract
A promising material among the nitrides of Group III, namely, aluminium nitride (AlN), is considered. This material is widely used in industry due to its unique properties. Main physical and mechanical properties of AlN, as well as the fields of its application (in acoustic, electronic, and optical devices), are discussed. According to thermodynamic calculations, the Gibbs free energy of the oxidation of metallic aluminium with Al2O3 formation is comparatively low, so, it interacts more actively with oxygen than with nitrogen. According to the van ’t Hoff equation, the reaction of aluminium with nitrogen is activated, when the partial pressure of nitrogen exceeds significantly the pressure of oxygen; only in this case, aluminium reacts predominantly with nitrogen and the AlN chemical compound is formed. The ways to reduce the negative impact of oxygen on the process of aluminium-nitride formation are discussed. The main techniques for manufacturing aluminium nitride, in particular, thin films, are considered; their main advantages and disadvantages are surveyed. As shown, based on the main mechanism of chemical reaction between the initial components, the manufacturing techniques are divided into six complex groups. Depending on the conditions of formation, aluminium nitride can have four modifications: (i) a wurtzite structure with a band gap width of 6.2 eV; (ii) a layered hexagonal structure with a band gap width of 3.44 eV; (iii) a zinc-blende structure with a band gap width of 3.24 eV; (iv) a rock-salt structure with a band gap width of 4.04 eV. The features of these types of AlN structure are analysed.
Keywords: aluminium nitride, manufacturing techniques, crystal structure, thin-film coating, physical and mechanical properties.
DOI: https://doi.org/10.15407/ufm.27.02.***
Citation: Е.M. Rudenko, I.V. Korotash, M.V. Dyakin, D.Yu. Polotskiy, S.A. Bespalov, O.V. Hamalii, N.V. Hamalii, and V.A. Dekhtyarenko, Aluminium Nitride as a Promising Multifunctional Material. Pt. 1. Properties, Crystal Structure, and Production Techniques, Progress in Physics of Metals, 27, No. 2: ***–*** (2026)