Випуски $\rightarrow$ Том 26, випуск 4 (2025)

Проґрес у механічних випробуваннях тонких плівок

БУРЛАКОВ В.О., ФІЛАТОВ О.В.

Інститут металофізики ім. Г.В. Курдюмова НАН України, бульв. Академіка Вернадського, 36; 03142 Київ, Україна

Отримано / остаточна версія: 05.06.2025 / 30.09.2025 Завантажити PDF logo PDF

Анотація
Представлено огляд сучасних методів визначення механічних характеристик тонких плівок товщиною від моноатомових шарів до мікрометра. Особливість міряння властивостей тонких плівок полягає в тому, що традиційні методи, які використовуються для досліджень масивних матеріялів, не є в змозі належним чином помітити поверхневі ефекти та позбавитися впливу підкладинки на результат дослідження. Тому міряння таких параметрів, як модуль Юнґа, Пуассонів коефіцієнт, мікротвердість, межа плинности, міцність на розрив і залишкове напруження тонких плівок потребує спеціяльних підходів або технологічних впроваджень. Упродовж останнього десятиліття в даній області помітно значний проґрес із запровадженням фрезерування сфокусованим йонним променем, атомно-силової мікроскопії, методів комп’ютерного моделювання та сучасних можливостей рентґенівської дифракції. Ці інструменти разом із методами випробування на вдавлення, вигин, подряпини та розтяг утворюють універсальний набір для дослідження механічних властивостей тонких плівок. У даному огляді детально описано фізичні принципи, переваги й обмеження, схеми й особливості процесу міряння, передові досягнення кожного із методів, в тому числі запропонованих в останні роки. Розглянуто вплив товщини на механічні властивості плівки. Запропоновано структуровану методологію вибору методу дослідження в залежності від товщини плівки, вимірюваних механічних параметрів та експериментальних обмежень.

Ключові слова: механічні властивості, тонкі плівки, наноіндентування, розтяг, мікростиснення, модуль Юнґа.

DOI: https://doi.org/10.15407/ufm.26.04.***

Citation: V.O. Burlakov and O.V. Filatov, Advances in Mechanical Testing of Thin Films, Progress in Physics of Metals, 26, No. 4: ***–*** (2025)

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