Випуски $\rightarrow$ Том 26, випуск 3 (2025)

Танталові покриття: застосування, методи та властивості

СЕРДЮК І.В.$^{1}$, КРИВОШАПКА Р.В.$^{1}$, СТОЛБОВИЙ В.О.$^{1,2}$, СЕРДЮК Н.О.$^{3}$

$^1$Національний науковий центр «Харківський фізико-технічний інститут» НАН України, вул. Академічна, 1, 61108 Харків, Україна
$^2$Харківський національний автомобільно-дорожній університет, вул. Ярослава Мудрого, 25, 61002 Харків, Україна
$^3$Харківський національний медичний університет, проспект Науки, 4, 61022 Харків, Україна

Отримано / остаточна версія: 10.03.2025 / 24.07.2025 Завантажити PDF logo PDF

Анотація
В роботі розглянуто методи одержання та методики дослідження, властивості та сфери застосування танталових покриттів. Ці покриття привертають увагу завдяки своїм властивостям: високій зносостійкості та корозійній стійкості, термічній стабільності, хемічній інертності та біосумісності. Представлені структурні, механічні, трибологічні, електричні, корозійні та біологічні властивості дають змогу встановити взаємозв’язок не тільки між технологічними параметрами одержання танталових покриттів (тиском арґону у вакуумній камері, температурою підкладинки, віддаллю між підкладинкою та мішенню тощо) та окремими властивостями, а й дослідити вплив структурно-фазового стану на різні властивості. На даний час танталові покриття широко застосовуються у мікроелектроніці, медицині та для захисту від корозії. Широкий спектер інформації, представленій у цій статті, дає змогу прогнозувати властивості та моделювати процеси одержання танталових покриттів з необхідними характеристиками. А це в свою чергу уможливить розширення сфери застосування танталових покриттів і поглиблення знання про взаємозв’язок між властивостями.

Ключові слова: тантал, нітриди, покриття, магнетронне розпорошення, вакуумно-дугове осадження, дослідницькі методи.

DOI: https://doi.org/10.15407/ufm.26.03.***

Citation: I.V. Serdiuk, R.V. Kryvoshapka, V.O. Stolbovyi, and N.O. Serdiuk, Tantalum Coatings: Applications, Techniques, and Properties, Progress in Physics of Metals, 26, No. 3: ***–*** (2025)

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