Випуски $\rightarrow$ Том 22, випуск 3 (2021)

Перенапружений наносекундний розряд у газах за атмосферного тиску та його застосування для синтезу наноструктур на основі перехідних металів

О. К. Шуаібов, А. О. Малініна

ДВНЗ «Ужгородський національний університет», Народна площа, 3, 88000 Ужгород, Україна

Отримано 14.02.2021; остаточна версія — 01.07.2021 Завантажити PDF logo PDF

Анотація
В оглядовій статті наведено характеристики та параметри перенапруженого наносекундного розряду між електродами з цинку, міді й алюмінію у повітрі й арґоні за атмосферного тиску. Представлено методику, техніку й умови експериментів з дослідження характеристик і параметрів перенапруженого наносекундного розряду та його застосування для синтези тонких наноструктурованих плівок оксидів перехідних металів, синтезованих в умовах інтенсивного ультрафіолетового (УФ) опромінення підкладинки з плівкою. Джерелом парів металів у плазмі стають мікровибухи неоднорідностей на поверхні електродів у сильному електричному полі. Наведено просторові, електричні й оптичні характеристики перенапруженого наносекундного розряду у повітрі й арґоні між електродами з перехідних металів, який запалювався в системах електродів «голка–голка». Наведено результати експериментального міряння параметрів плазми розряду на основі газопарових сумішей Cu–повітря. Розглянуто оптичні характеристики тонких наноструктурованих плівок оксидів перехідних металів, синтезованих в умовах автоматичного УФ-опромінення підкладинки плазмою розряду.

Ключові слова: перенапружений наносекундний розряд, цинкові, мідні й алюмінійові електроди, тонкі наноструктуровані плівки.

Citation: O. K. Shuaibov and A. O. Malinina, Overstressed Nanosecond Discharge in the Gases at Atmospheric Pressure and Its Application for the Synthesis of Nanostructures Based on Transition Metals, Progress in Physics of Metals, 22, No. 3: 382–439 (2021); doi: 10.15407/ufm.22.03.382

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