Issues »  Volume 15, Issue 3

Modelling and Diagnostics of Damages and Strains in a Crystal of Gd$_{3}$Ga$_{5}$O$_{12}$ After Implantation of F$^{+}$ Ions

V. O. Kotsyubyns’kyy$^{1}$, V. M. Pylypiv$^{1}$, B. K. Ostafiychuk$^{1}$, I. P. Yaremiy$^{1}$, O. Z. Garpul’$^{1}$, S. J. Olikhovskyy$^{2}$, O. S. Skakunova$^{2}$, V. B. Molodkin$^{2}$, Ye. M. Kyslovs’kyy$^{2}$, T. P. Vladimirova$^{2}$, O. V. Reshetnyk$^{2}$, Ye. V. Kochelab$^{2}$

$^1$Vasyl Stefanyk Precarpathian National University, 57 Shevchenko Str., 76018 Ivano-Frankivsk, Ukraine
$^2$G.V. Kurdyumov Institute for Metal Physics, NAS of Ukraine, 36 Academician Vernadsky Blvd., UA-03142 Kyiv, Ukraine

Received: 01.07.2014. Download: PDF

Mathematical modelling of fluorine ion implantation process is carried out by using the SRIM-2008 program for the determination of quantitative characteristics of the radiation defect formation in the gadolinium–gallium garnet (GGG). The crystal depth distributions are measured for elastic and inelastic energy losses of both the implanted F$^{+}$ ion with 90 keV energy and the displaced matrix ions due to their slowing-down in the GGG crystal. Depth distribution profiles are obtained for quantities of implanted and displaced ions. The damage pattern and its quantitative characteristics are determined. Structural changes caused by fluorine ion implantation in a surface layer of the GGG single crystal are investigated by an X-ray diffraction technique. The shape of the strain profile in the implanted layer and relationships of its characteristics with the simulation results are determined.

Keywords: gadolinium gallium garnet, ion implantation, primary and secondary radiation defects, mathematic modeling, deformation, double-crystal X-ray diffractometer, diffraction reflection curve.

PACS: 61.05.cp, 61.05.Np, 61.72.Dd, 61.72.Hh, 61.72.J-, 61.72.up, 61.80.Az

DOI: https://doi.org/10.15407/ufm.15.03.121

Citation: V. O. Kotsyubyns’kyy, V. M. Pylypiv, B. K. Ostafiychuk, I. P. Yaremiy, O. Z. Garpul’, S. J. Olikhovskyy, O. S. Skakunova, V. B. Molodkin, Ye. M. Kyslovs’kyy, T. P. Vladimirova, O. V. Reshetnyk, and Ye. V. Kochelab, Modelling and Diagnostics of Damages and Strains in a Crystal of Gd$_{3}$Ga$_{5}$O$_{12}$ After Implantation of F$^{+}$ Ions, Usp. Fiz. Met., 15, No. 3: 121—143 (2014) (in Ukrainian), doi: 10.15407/ufm.15.03.121

References (40)  
  1. O. A. Petrenko, C. Ritter, M. Yethiraj, and D. McK Paul, Phys. Rev. Lett., 80, No. 20: 4570 (1998). Crossref
  2. Y.-N. Xu, W. Y. Ching, and B. K. Brickeen, Phys. Rev. B, 61, No. 3: 1817 (2000). Crossref
  3. L. Lipińska, W. Ryba-Romanowski, A. Rzepka, S. Ganschow, R. Lisiecki, R. Diduszko, and A. Pajączkowska, Cryst. Res. Technol., 44, No. 5: 477 (2009). Crossref
  4. A. O. Matkovskii, D. Yu. Sugak, S. B. Ubizskii, U. A. Ulmanis, and A. P. Shakhov, phys. status solidi (a), 128, No. 1: 21 (1991).
  5. Z. Jia, A. Arcangeli, X. Tao, J. Zhang, Ch. Dong, M. Jiang, L. Bonelli, and M. Tonelli, J. Appl. Phys., 105, No. 8: 083113 (2009). Crossref
  6. A. Kamińska, S. Biernacki, S. Kobyakov, A. Suchocki, G. Boulon, M. O. Ramirez, and L. Bausa, Phys. Rev. B, 75, No. 17: 174111 (2007). Crossref
  7. F. J. Bruni, Crystals: Growth, Properties and Applications (Eds. C. J. M. Rooijman) (Berlin–Heidelberg–New York: Springer: 1978), vol. 1, p. 139.
  8. S. B. Ubizskii, A. O. Matkovskii, N. Mironova-Ulmane, V. Skvortsova, A. Suchocki, Y. A. Zhydachevskii, and P. Potera, phys. status solidi (a), 177: 349 (2000).
  9. P. Potera, Comput. Methods Sci. Technol., 13, No. 1: 47 (2007). Crossref
  10. http://www.srim.org/SRIM/SRIMLEGL.htm.
  11. H. Rissel and I. Ruge, Ionnaya Implantatsiya [Ion Implantation] (Moscow: Nauka: 1983) (Russian translation).
  12. Ionnaya Implantatsiya i Luchevaya Tekhnologiya [Ion Implantation and Radiation Technology] (Eds. J. S. Williams and J. M. Poate) (Kiev: Naukova dumka: 1988) (Russian translation).
  13. A. M. Afanasiev, P. A. Aleksandrov, and R. M. Imamov, Rentgenodiffraktsionnaya Diagnostika Submikronnykh Sloyov [X-Ray Diffraction Diagnostics of Submicron Layers] (Moscow: Nauka: 1989) (in Russian).
  14. V. Holy, U. Pietch, and T. Baumbach, High-Resolution X-Ray Scattering from Thin Films and Multilayers (Berlin–Heidelberg: Springer Verlag: 1998).
  15. A. O. Matkowski, D. Yu. Sugak, S. B. Ubizskii, and I. V. Kityk, Opto-Electron. Rev., 3, No. 2: 41 (1995).
  16. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (New York: Pergamon Press: 1995).
  17. M. Nastasi, J. W. Mayer, and J. K. Hirvonen, Ion–Solid Interactions: Fundamentals and Applications (Cambridge: Cambridge University Press: 1996). Crossref
  18. C. R. Fritzsche, Appl. Phys., 12, No. 4: 347 (1977). Crossref
  19. B. K. Ostafiychuk, V. A. Oleynik, V. M. Pylypiv, B. T. Semen, L. M. Smerklo, B. I. Yavorskiy, V. I. Kravets, and I. V. Koval', Kristallicheskaya i Magnitnaya Struktura Implantirovannykh Sloyov Monokristallicheskikh Plyonok Zhelezoittrievogo Granata [The Crystal and Magnetic Structure of the Implanted Layers of Single-Crystalline Films of Ferrum–Yttrium Garnet] (Kiev: 1991) (Prepr. / AN UkrSSR. In-t Metallofiziki, Nos. 1-91: 1991) (in Russian).
  20. B. K. Ostafiychuk, V. M. Tkachuk, O. N. Voronchak, and B. I. Yavorskiy, Metallofiz. Noveishie Tekhnol., 16, No. 8: 51 (1994) (in Russian).
  21. K. Komenou, J. Hiraі, K. Asama, and M. Sakai, J. Appl. Phys., 49, No. 12: 5806 (1978).
  22. V. M. Koshkin and Yu. R. Zabrodskiy, Fiz. Tverdogo Tela, 16, No. 11: 3480 (1974) (in Russian).
  23. V. M. Koshkin, Fiz. Nizkikh Temperatur, 28, Nos. 8–9: 963 (2002) (in Russian).
  24. K. Lal and H. K. Jhans, J. Phys. C: Solid State Phys., 10: 1315 (1977). Crossref
  25. H. Donnerberg and C. R. A. Catlow, Phys. Rev. Lett., 100, No. 25: 257202 (2008). Crossref
  26. H. Donnerberg and C. R. A. Catlow, Phys. Rev. B, 50, No. 2: 744 (1994). Crossref
  27. V. O. Kotsyubyns'kyy, V. V. Nemoshkalenko, B. K. Ostafіychuk, Ya. P. Salіy, V. D. Fedorіv, and P. І. Yurchishin, Metallofiz. Noveishie Tekhnol., 23, No. 11: 1455 (2001) (in Ukrainian).
  28. W. H. de Roode and H. A. Algra, J. Appl. Phys., 53: 2507 (1982). Crossref
  29. V. M. Pylypіv, V. O. Kotsyubyns'kyy, and O. O. Hryhoruk, Materials of XI International Conference 'Physics and Technology of Thin Films and Nanosystems' (May 7–12, 2007, Ivanо-Frankivsk) (Ivanо-Frankivsk: Published-Design Centre of Vasyl Stefanyk Pre-Carpathian National University: 2007), vol. 1, p. 95 (in Ukrainian).
  30. B. K. Ostafіychuk, V. D. Fedorіv, V. V. Kaspruk, and V. M. Pylypіv, Fizika і Khimiya Tverdogo Tila, 5, No. 4: 722 (2004) (in Ukrainian).
  31. V. O. Kotsyubyns'kyy, B. K. Ostafіychuk, B. І. Yavors'kyy, and І. P. Yaremіy, Bulletin of Pre-Carpathian University. Mathematics. Physics. Chemistry, 2: 67 (1999) (in Ukrainian).
  32. J. P. Eymery, Rev. Phys. Appl., No. 23: 925 (1988). Crossref
  33. Sh. Sh. Bashkirov, N. G. Ivojlov, and E. S. Romanov, Fiz. Tverdogo Tela, 27, No. 9: 2853 (1985) (in Russian).
  34. A. Markyalis and L. Pranyavichus, Lit. Fiz. Sb., 18, No. 5: 647 (1978) (in Russian).
  35. S. I. Golubov, A. V. Barashev, and R. E. Stoller, Comprehensive Nuclear Materials (Eds. R. J. M. Konings) (Amsterdam: Elsevier: 2012), vol. 1.
  36. M. Wormington, C. Panaccione, K. M. Matney, and D. K. Bowen, Philos. Trans. R. Soc. Lond. A, 357: 2827 (1999). Crossref
  37. V. G. Kon, M. V. Prilepskiy, and I. M. Sukhodreva, Poverkhnost', No. 11: 122 (1984) (in Russian).
  38. V. M. Pylypіv, S. Y. Olіkhovs'kyy, T. P. Vladіmіrova, O. S. Skakunova, V. B. Molodkіn, B. K. Ostafіychuk, E. M. Kyslovs'kyy, O. V. Reshetnyk, S. V. Lіzunova, and O. Z. Harpul', Metallofiz. Noveishie Tekhnol., 33, No. 9: 1145 (2011) (in Ukrainian).
  39. P. Ehrhart, K. H. Robrock, and H. R. Shober, Physics of Radiation Effects in Crystals (Eds. R. A. Johnson and A. N. Orlov) (Oxford: Elsevier Science: 1986), p. 3. Crossref
  40. O. S. Skakunova, V. M. Pylypіv, S. Y. Olіkhovs'kyy, T. P. Vladіmіrova, B. K. Ostafіychuk, V. B. Molodkіn, E. M. Kyslovs'kiy, O. V. Reshetnyk, O. Z. Harpul', A. V. Kravets', and V. L. Makіvs'ka, Metallofiz. Noveishie Tekhnol., 34, No. 10: 1325 (2012) (in Ukrainian).
Cited By (1)
  1. V. V. Kurylyak and G. I. Khimicheva, Usp. Fiz. Met. 18, 155 (2017).

© 2013–2018 "G.V. Kurdyumov Institute for Metal Physics"