Coatings on the Basis of Chromium Nitride. Experience of Design and Investigation
A. G. Gyglya, I. M. Neklyudov
National Science Center Kharkov Institute of Physics and Technology, NAS of Ukraine, 1 Akademicheskaya Str., 61108 Kharkov, Ukraine
Received: 11.05.2005. Download: PDF
The investigation results concerning fabrication and application of Cr–N coatings, which are produced by the vacuum-arc evaporation, magnetron sputtering, and ion-beam-assisted deposition, are systematized. The links between base parameters of these processes such as gas pressure, ion energy, ionization degree, bias potential and structure, mechanical, and tribological characteristics are analyzed. The characteristic differences of fabrication conditions for CrN and Cr$_{2}$N coatings are revealed. The comparison of performance attributes of Ti–N and Cr–N coatings is carried out.
Keywords: Cr–N and Ti–N coatings, vacuum-arc evaporation, magnetron sputtering, ion-beam-assisted deposition.
PACS: 62.20.Qp, 68.55.Ln, 68.60.Bs, 81.15.Cd, 81.15.Ef, 81.15.Jj, 81.65.Lp
DOI: https://doi.org/10.15407/ufm.06.03.197
Citation: A. G. Gyglya and I. M. Neklyudov, Coatings on the Basis of Chromium Nitride. Experience of Design and Investigation, Usp. Fiz. Met., 6, No. 3: 197—232 (2005) (in Russian), doi: 10.15407/ufm.06.03.197